IEEE - Institute of Electrical and Electronics Engineers, Inc. - Digital resonance tuning of high-Q/V m silicon photonic crystal nanocavities by atomic layer deposition

2008 Conference on Lasers and Electro-Optics (CLEO)

Author(s): C.J. Chen ; Xiaodong Yang ; C.A. Husko ; Chee Wei Wong
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 May 2008
Conference Location: San Jose, CA, USA
Conference Date: 4 May 2008
Page(s): 1 - 2
ISBN (Paper): 978-1-55752-859-9
DOI: 10.1109/CLEO.2008.4551359
Regular:

We propose and demonstrate the digital resonance tuning of high-Q/Vm silicon photonic crystal nanocavities using self-limiting atomic layer deposition. Control of resonances of 122... View More

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