IEEE - Institute of Electrical and Electronics Engineers, Inc. - Design and fabrication of MJTCs on quartz substrates at NIST

2008 Conference on Precision Electromagnetic Measurements

Author(s): L. Scarioni ; T.E. Lipe ; J.R. Kinard
Sponsor(s): Bur. Int. Poids Meas. (BIPM)
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2008
Conference Location: Broomfield, CO, USA
Conference Date: 8 June 2008
Page(s): 648 - 649
ISBN (CD): 978-1-4244-2400-9
ISBN (Paper): 978-1-4244-2399-6
DOI: 10.1109/CPEM.2008.4574946
Regular:

Dry etching is employed in the fabrication of new planar, thin-film multijunction thermal converters (MJTCs) on quartz membranes and crystalline quartz chips at NIST. The use of crystalline quartz... View More

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