IEEE - Institute of Electrical and Electronics Engineers, Inc. - Silicon lattice-parameter measurements with centimeter x-ray interferometry

2008 Conference on Precision Electromagnetic Measurements

Author(s): L. Ferroglio ; G. Mana ; E. Massa
Sponsor(s): Bur. Int. Poids Meas. (BIPM)
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2008
Conference Location: Broomfield, CO, USA
Conference Date: 8 June 2008
Page(s): 410 - 411
ISBN (CD): 978-1-4244-2400-9
ISBN (Paper): 978-1-4244-2399-6
DOI: 10.1109/CPEM.2008.4574827
Regular:

A combined x-ray and optical interferometer capable of centimeter displacements has been realized to measure the lattice parameter of a 28Si crystal to within a 3 x 10-9... View More

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