IEEE - Institute of Electrical and Electronics Engineers, Inc. - Electrostatic actuated mems for precision AC voltage references

2008 Conference on Precision Electromagnetic Measurements

Author(s): A. Bounouh ; H. Camon ; T. Ricart ; C. Pisella ; F. Ziade ; A. Polletaeff ; D. Allal ; R. Plana ; D. Leprat
Sponsor(s): Bur. Int. Poids Meas. (BIPM)
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2008
Conference Location: Broomfield, CO, USA
Conference Date: 8 June 2008
Page(s): 220 - 221
ISBN (CD): 978-1-4244-2400-9
ISBN (Paper): 978-1-4244-2399-6
ISSN (Electronic): 2160-0171
ISSN (Paper): 0589-1485
DOI: 10.1109/CPEM.2008.4574732
Regular:

The purpose of this paper is to present results on the design of electrostatic actuated micro- electromechanical systems (MEMS) aiming at developing AC voltage references through... View More

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