IEEE - Institute of Electrical and Electronics Engineers, Inc. - Synergy between design and process: A key factor in the evolving microelectronic landscape

2008 IEEE International Conference on IC Design and Technology & Tutorial (ICICDT)

Author(s): Michel Brillouet
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2008
Conference Location: Austin, TX, USA
Conference Date: 2 June 2008
ISBN (CD): 978-1-4244-1811-4
ISBN (Paper): 978-1-4244-1810-7
DOI: 10.1109/ICICDT.2008.4567227
Regular:

In scaling down the dimensions of the transistors in integrated circuits, major issues need to be solved. As we approach the resolution limit of the lithographic tool, extensive modifications of... View More

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