IEEE - Institute of Electrical and Electronics Engineers, Inc. - Hermeticity testing of capacitive RF MEMS switches

2008 IEEE International Reliability Physics Symposium (IRPS)

Author(s): P.J. van der Wel ; J. Stulemeijer ; J.A. Bielen ; F.G.A. Theunis ; A. den Dekker ; M.A.J. van Gils ; R.J. Havens
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 April 2008
Conference Location: Phoenix, AZ, USA
Conference Date: 27 April 2008
Page(s): 691 - 692
ISBN (CD): 978-1-4244-2050-6
ISBN (Paper): 978-1-4244-2049-0
DOI: 10.1109/RELPHY.2008.4558991
Regular:

RF MEMS capacitive switches can be used for band switching and adaptive antenna matching in cell phone Front End Modules. They are extremely linear and, if made in standard silicon technology, can... View More

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