IEEE - Institute of Electrical and Electronics Engineers, Inc. - Visualization and damage due to nano-dendrite defects in metal-insulator-metal capacitors

2008 IEEE International Reliability Physics Symposium (IRPS)

Author(s): Lieyi Sheng ; E. Snyder ; S. Steidley ; A. Sierra ; E. Glines
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 April 2008
Conference Location: Phoenix, AZ, USA
Conference Date: 27 April 2008
Page(s): 649 - 650
ISBN (CD): 978-1-4244-2050-6
ISBN (Paper): 978-1-4244-2049-0
DOI: 10.1109/RELPHY.2008.4558970
Regular:

Metal-insulator-metal (MIM) capacitors have found wide use in analog/mixed-signal IC products. However, a variety of extrinsic defects can occur during manufacture. Surface roughness and... View More

Advertisement