IEEE - Institute of Electrical and Electronics Engineers, Inc. - Statistical evaluation for anomalous SILC of tunnel oxide using integrated array TEG

2008 IEEE International Reliability Physics Symposium (IRPS)

Author(s): Y. Kumagai ; A. Teramoto ; S. Sugawa ; T. Suwa ; T. Ohmi
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 April 2008
Conference Location: Phoenix, AZ, USA
Conference Date: 27 April 2008
Page(s): 219 - 224
ISBN (CD): 978-1-4244-2050-6
ISBN (Paper): 978-1-4244-2049-0
DOI: 10.1109/RELPHY.2008.4558890
Regular:

We propose a new test-element-group (TEG) in order to study anomalous stress-induced leakage current (SILC) of tunnel oxide, which is a problem for flash memory reliability. Using this TEG, gate... View More

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