IEEE - Institute of Electrical and Electronics Engineers, Inc. - TDDB robustness of highly dense 65NM BEOL vertical natural capacitor with competitive area capacitance for RF and mixed-signal applications

2008 IEEE International Reliability Physics Symposium (IRPS)

Author(s): A.H. Fischer ; Y.K. Lim ; P. Riess ; T. Pompl ; B.C. Zhang ; E.C. Chua ; W.W. Keller ; J.B. Tan ; V. Klee ; Y.C. Tan ; D. Souche ; D.K. Sohn ; A. von Glasow
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 April 2008
Conference Location: Phoenix, AZ, USA
Conference Date: 27 April 2008
Page(s): 126 - 131
ISBN (CD): 978-1-4244-2050-6
ISBN (Paper): 978-1-4244-2049-0
DOI: 10.1109/RELPHY.2008.4558873
Regular:

The integration of vertical natural capacitors (VNCap) into existing backend-of-line (BEOL) stacks is an important aspect to enable radio-frequency and mixed signal features without extra mask... View More

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