IEEE - Institute of Electrical and Electronics Engineers, Inc. - High voltage MEMS platform for fully integrated, on-chip, vacuum electronic devices

IEEE International Vacuum Electronics Conference (IVEC 2008)

Author(s): S. Natarajan ; C.B. Parker ; J.T. Glass ; C.A. Bower ; K.H. Gilchrist ; J.R. Piascik ; B.R. Stoner
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 May 2008
Conference Location: Monterey, CA, USA
Conference Date: 22 April 2008
Page(s): 24 - 25
ISBN (Paper): 978-1-4244-1715-5
DOI: 10.1109/IVELEC.2008.4556325
Regular:

We demonstrate a fully integrated, on-chip, vacuum microtriode capable of handling voltages up to 800 V. The ability to operate at such high voltages is achieved by the addition of a 10 mum-thick... View More

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