IEEE - Institute of Electrical and Electronics Engineers, Inc. - Photothermal vibration spectra of square diaphragm with boss for low-pressure sensor

2008 26th International Conference on Microelectronics

Author(s): D.M. Todorovic ; B. Cretin ; Y.Q. Song ; M.M. Smiljanic ; Z. Lazic ; K. Radulovic
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 May 2008
Conference Location: Nis, Serbia & Montenegro
Conference Date: 11 May 2008
Page(s): 325 - 328
ISBN (CD): 978-1-4244-1882-4
ISBN (Paper): 978-1-4244-1881-7
DOI: 10.1109/ICMEL.2008.4559287
Regular:

The low-pressure sensors (IHTM-CMTM, SP-6) with square diaphragms and concentric bosses were investigated by the photothermal elastic vibration method. The photothermal vibrations were optically... View More

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