IEEE - Institute of Electrical and Electronics Engineers, Inc. - A low-power interface for the readout and motion-control of a MEMS capacitive sensor

AMC '08. 10th International Workshop on Advanced Motion Control

Author(s): S.A. Jawed ; D. Cattin ; M. Gottardi ; N. Massari ; R. Oboe ; A. Baschirotto
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 March 2008
Conference Location: Trento, Italy
Conference Date: 26 March 2008
Page(s): 122 - 125
ISBN (CD): 978-1-4244-1703-2
ISBN (Paper): 978-1-4244-1702-5
DOI: 10.1109/AMC.2008.4516052
Regular:

A low-power interface for readout and motion-control of a MEMS capacitive sensor is presented. The interface consists of a hybrid third-order sigma-delta modulator. The interface enhances the... View More

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