IEEE - Institute of Electrical and Electronics Engineers, Inc. - Fabrication of compact polymer waveguide devices using air-trench bends and splitters

IEEE SoutheastCon 2008

Author(s): Yongbin Lin ; N. Rahmanian ; Seunghyun Kim ; G.P. Nordin
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 April 2008
Conference Location: Huntsville, AL, USA
Conference Date: 3 April 2008
Page(s): 421 - 426
ISBN (CD): 978-1-4244-1884-8
ISBN (Paper): 978-1-4244-1883-1
DOI: 10.1109/SECON.2008.4494331
Regular:

A fabrication process for PFCB waveguide air-trench bends and splitters with scanning electron microscope (SEM)-based electron beam lithography (EBL) with alignment accuracy better than 40 nm has... View More

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