IEEE - Institute of Electrical and Electronics Engineers, Inc. - Rapid thermal annealing enhanced crystalline SiC particles at lower formation temperature

3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Author(s): B.H. Wu ; C.K. Chung ; C.C. Peng
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2008
Conference Location: Sanya, China
Conference Date: 6 January 2008
Page(s): 1,181 - 1,184
ISBN (CD): 978-1-4244-1908-1
ISBN (Paper): 978-1-4244-1907-4
DOI: 10.1109/NEMS.2008.4484528
Regular:

Formation of nanoparticle SiC (np-SiC) from three-layer Si/C/Si multilayers on Si(100) substrates were investigated using ultra-high-vacuum ion beam sputtering and post annealing by conventional... View More

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