IEEE - Institute of Electrical and Electronics Engineers, Inc. - Analysis of different effect on the response of SAW hydrogen gas sensor

3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Author(s): Jurying Zhou ; Chunmin Tao ; Chenbo Yin
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2008
Conference Location: Sanya, China
Conference Date: 6 January 2008
Page(s): 1,168 - 1,171
ISBN (CD): 978-1-4244-1908-1
ISBN (Paper): 978-1-4244-1907-4
DOI: 10.1109/NEMS.2008.4484525
Regular:

A three-dimensional finite element model of a surface acoustic wave (SAW) delay line based hydrogen gas sensor on Y- X cut LiNbO3 substrate with a palladium film was developed and... View More

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