IEEE - Institute of Electrical and Electronics Engineers, Inc. - Research on gas film damping of an electrostatically levitated micromachined accelerometer

3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Author(s): Liming Wu ; Jingxin Dong ; Fengtian Han ; Zijian Li
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2008
Conference Location: Sanya, China
Conference Date: 6 January 2008
Page(s): 1,081 - 1,086
ISBN (CD): 978-1-4244-1908-1
ISBN (Paper): 978-1-4244-1907-4
DOI: 10.1109/NEMS.2008.4484506
Regular:

Squeeze film damping and slide film damping for an electrostatically levitated ring-shaped proof-mass are calculated and measured. This paper has derived three-dimensional linearized Reynolds... View More

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