IEEE - Institute of Electrical and Electronics Engineers, Inc. - An integrated fully-differential CMOS-MEMS z-axis accelerometer utilizing a torsional suspension

3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Author(s): Hongwei Qu ; Deyou Fang ; Huikai Xie
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2008
Conference Location: Sanya, China
Conference Date: 6 January 2008
Page(s): 1,063 - 1,066
ISBN (CD): 978-1-4244-1908-1
ISBN (Paper): 978-1-4244-1907-4
DOI: 10.1109/NEMS.2008.4484502
Regular:

This paper presents an integrated fully-differential CMOS-MEMS z-axis accelerometer utilizing a torsional sensing element. The sidewall capacitors formed by multiple CMOS interconnect metal layers... View More

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