IEEE - Institute of Electrical and Electronics Engineers, Inc. - Numerical simulation and analysis of an electroactuated MEMS capacitive switch using finite element method

3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Author(s): Xun-Jun He ; Qun Wu ; Ming-Xin Song ; Yue Wang ; Kai Tang ; Jing-Hua Yin
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2008
Conference Location: Sanya, China
Conference Date: 6 January 2008
Page(s): 1,020 - 1,023
ISBN (CD): 978-1-4244-1908-1
ISBN (Paper): 978-1-4244-1907-4
DOI: 10.1109/NEMS.2008.4484494
Regular:

The MEMS capacitive switch based on fixed-fixed microbeam have garnered significant attention due to their geometric simplicity and broad applicability, and the accurate models should be developed... View More

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