IEEE - Institute of Electrical and Electronics Engineers, Inc. - Integrated CNT sensors in polymer microchannel for gas-flow shear-stress measurement

3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Author(s): W.W.Y. Chow ; W.J. Li ; S.C.H. Tung
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2008
Conference Location: Sanya, China
Conference Date: 6 January 2008
Page(s): 1,011 - 1,014
ISBN (CD): 978-1-4244-1908-1
ISBN (Paper): 978-1-4244-1907-4
DOI: 10.1109/NEMS.2008.4484492
Regular:

We have developed CNT sensors for gas-flow shear stress measurement inside a polymethylmethacrylate (PMMA) microchannel. An array of sensors is fabricated by using dielectrophoretic (DEP)... View More

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