IEEE - Institute of Electrical and Electronics Engineers, Inc. - Design of temperature controlled micro-hotplate for CMOS CO sensor

3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Author(s): Benxian Peng ; Ting Yu ; Fengqi Yu
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2008
Conference Location: Sanya, China
Conference Date: 6 January 2008
Page(s): 895 - 898
ISBN (CD): 978-1-4244-1908-1
ISBN (Paper): 978-1-4244-1907-4
DOI: 10.1109/NEMS.2008.4484467
Regular:

A novel design for the temperature control of a micro-hotplate gas sensor is presented. Finite difference algorithm is developed to solve the sensor temperature stability problem under ambient air... View More

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