IEEE - Institute of Electrical and Electronics Engineers, Inc. - A MEMS-based ionization gas sensor using carbon nanotubes and dielectric barrier

3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Author(s): Jiahao Wu ; Hai Liu ; Yanyan Wang ; Dong Xu ; Yafei Zhang
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2008
Conference Location: Sanya, China
Conference Date: 6 January 2008
Page(s): 824 - 827
ISBN (CD): 978-1-4244-1908-1
ISBN (Paper): 978-1-4244-1907-4
DOI: 10.1109/NEMS.2008.4484451
Regular:

We have demonstrated here the successful operation of an ionization gas sensor with gap spacing 2~10 mum and using CNTs (carbon nanotubes) as the electrode material. By set up an appropriate... View More

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