IEEE - Institute of Electrical and Electronics Engineers, Inc. - A touch mode capacitive pressure sensor with long linear range and high sensitivity

3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Author(s): Haojie Lv ; Qiang Guo ; Guoqing Hu
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2008
Conference Location: Sanya, China
Conference Date: 6 January 2008
Page(s): 796 - 800
ISBN (CD): 978-1-4244-1908-1
ISBN (Paper): 978-1-4244-1907-4
DOI: 10.1109/NEMS.2008.4484445
Regular:

A novel structure was developed which can improve linear range and sensitivity of touch mode capacitive pressure sensor (TMCPS) in this article. As for the double-notch touch mode capacitive... View More

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