IEEE - Institute of Electrical and Electronics Engineers, Inc. - Quantitative feedback control of a linear positioning stage with cogging force compensation

3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Author(s): Shangying Zhang ; Xuedong Chen ; Haihua Mu ; Hui Zhao
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2008
Conference Location: Sanya, China
Conference Date: 6 January 2008
Page(s): 660 - 663
ISBN (CD): 978-1-4244-1908-1
ISBN (Paper): 978-1-4244-1907-4
DOI: 10.1109/NEMS.2008.4484417
Regular:

Quantitative feedback control of a linear positioning stage with cogging force compensation is presented. Positioning stage direct-driven by linear motors commonly suffers from significant... View More

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