IEEE - Institute of Electrical and Electronics Engineers, Inc. - CMOS micromachined capacitive cantilevers for EFM-based mass data storage

3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Author(s): Shi-Jie Hung ; Shih-Wei Wang ; M.S.-C. Lu
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2008
Conference Location: Sanya, China
Conference Date: 6 January 2008
Page(s): 605 - 608
ISBN (CD): 978-1-4244-1908-1
ISBN (Paper): 978-1-4244-1907-4
DOI: 10.1109/NEMS.2008.4484405
Regular:

This work presents the CMOS capacitive cantilevers intended for detecting charge-induced electrostatic force in an EFM-based data storage device. The cantilever can be electrostatically actuated... View More

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