IEEE - Institute of Electrical and Electronics Engineers, Inc. - A novel electromagnetically actuated resonant MEMS scanning mirror with large deflection

3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Author(s): Canjun Mu ; Feiling Zhang ; Liang Lu ; Yarning Wu
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2008
Conference Location: Sanya, China
Conference Date: 6 January 2008
Page(s): 600 - 604
ISBN (CD): 978-1-4244-1908-1
ISBN (Paper): 978-1-4244-1907-4
DOI: 10.1109/NEMS.2008.4484404
Regular:

This work presents a novel electromagnetically actuated microelectromechanical systems (MEMS) scanning mirror with large deflection for optical scanning applications. This optical scanning... View More

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