IEEE - Institute of Electrical and Electronics Engineers, Inc. - Design and fabrication of a MEMS-based multi-sensor

3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Author(s): Duk-Soo Eun ; Dae-Young Kong ; Hyun-Jun Yoo ; Young-Myong Hong ; Jong-Min Jang ; Tae-Wook Kang ; In-Sik Yu ; Jong-Hyun Lee
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2008
Conference Location: Sanya, China
Conference Date: 6 January 2008
Page(s): 588 - 591
ISBN (CD): 978-1-4244-1908-1
ISBN (Paper): 978-1-4244-1907-4
DOI: 10.1109/NEMS.2008.4484401
Regular:

In this paper, a newly-designed tamper detection multi-sensor with various functions is proposed. The multi-sensor consists of three different sensors, a piezoresistive sensor with and without... View More

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