IEEE - Institute of Electrical and Electronics Engineers, Inc. - Biosensors based on flexural mode piezo-diaphragm

3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Author(s): Zhihong Wang ; Jianmin Miao ; Ting Xu ; Ling Yu ; Chang Ming Li ; Xiaofeng Chen
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2008
Conference Location: Sanya, China
Conference Date: 6 January 2008
Page(s): 374 - 378
ISBN (CD): 978-1-4244-1908-1
ISBN (Paper): 978-1-4244-1907-4
DOI: 10.1109/NEMS.2008.4484355
Regular:

This paper presents a mass sensitive biosensor utilizing a flexural vibration mode of a micromachined piezoelectric micro-diaphragm. The mass sensitivity of the diaphragm has been investigated... View More

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