IEEE - Institute of Electrical and Electronics Engineers, Inc. - Hybrid macromodels for modeling and simulation of a z-axis micro accelerometer

3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Author(s): Jinghui Xu ; Weizheng Yuan ; Honglong Chang ; Xianglian Lv ; Yiting Yu
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2008
Conference Location: Sanya, China
Conference Date: 6 January 2008
Page(s): 357 - 361
ISBN (CD): 978-1-4244-1908-1
ISBN (Paper): 978-1-4244-1907-4
DOI: 10.1109/NEMS.2008.4484351
Regular:

A design method based on hybrid macromodels for system-level modeling and simulation of MEMS devices was presented, by which the MEMS device was firstly divided into several substructures, then... View More

Advertisement