IEEE - Institute of Electrical and Electronics Engineers, Inc. - Design and optimization of a micro piezoresistive pressure sensor

3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Author(s): Shuang Chen ; Ming-quan Zhu ; Bing-he Ma ; Wei-zheng Yuan
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2008
Conference Location: Sanya, China
Conference Date: 6 January 2008
Page(s): 351 - 356
ISBN (CD): 978-1-4244-1908-1
ISBN (Paper): 978-1-4244-1907-4
DOI: 10.1109/NEMS.2008.4484350
Regular:

This paper focuses the structural design and optimisation of the micro piezoresistive pressure sensor to enhance the sensitivity and linearity. Finite element method (FEM) is adopted to optimize... View More

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