IEEE - Institute of Electrical and Electronics Engineers, Inc. - Design and optimization of a micro piezoresistive pressure sensor
3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems
Author(s): | Shuang Chen ; Ming-quan Zhu ; Bing-he Ma ; Wei-zheng Yuan |
Publisher: | IEEE - Institute of Electrical and Electronics Engineers, Inc. |
Publication Date: | 1 January 2008 |
Conference Location: | Sanya, China |
Conference Date: | 6 January 2008 |
Page(s): | 351 - 356 |
ISBN (CD): | 978-1-4244-1908-1 |
ISBN (Paper): | 978-1-4244-1907-4 |
DOI: | 10.1109/NEMS.2008.4484350 |
Regular:
This paper focuses the structural design and optimisation of the micro piezoresistive pressure sensor to enhance the sensitivity and linearity. Finite element method (FEM) is adopted to optimize... View More