IEEE - Institute of Electrical and Electronics Engineers, Inc. - Piezoelectric materials for MEMS applications

3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Author(s): M.D. Nguyen ; K. Karakaya ; P. te Riele ; D.H.A. Blank ; G. Rijnders
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2008
Conference Location: Sanya, China
Conference Date: 6 January 2008
Page(s): 315 - 318
ISBN (CD): 978-1-4244-1908-1
ISBN (Paper): 978-1-4244-1907-4
DOI: 10.1109/NEMS.2008.4484342
Regular:

Epitaxial oxide YSZ/SRO/PZT/SRO capacitors have been grown on Si(001) substrates by pulsed laser deposition, and mechanisms of polarization switching and fatigue are investigated. It is found that... View More

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