IEEE - Institute of Electrical and Electronics Engineers, Inc. - Roller-based laser assisted direct imprinting for nanofabrication

3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Author(s): Yung-Chun Lee ; Chun-Hsiang Chen ; Cheng-Yu Chiu ; Shuo Hung Chang ; Fuh-Yu Chang ; Hung-Yi Lin ; Wen-Lang Lai
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2008
Conference Location: Sanya, China
Conference Date: 6 January 2008
Page(s): 296 - 299
ISBN (CD): 978-1-4244-1908-1
ISBN (Paper): 978-1-4244-1907-4
DOI: 10.1109/NEMS.2008.4484339
Regular:

This paper reports an improved nanofabrication method based on laser-assisted direct imprinting (LADI) technology. The key element in this improvement is to introduce a quartz roller into the LADI... View More

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