IEEE - Institute of Electrical and Electronics Engineers, Inc. - Silicon beam structures comprising nanophotonics as NEMS sensors

3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Author(s): Chengkuo Lee ; J. Thillaigovindan ; R. Radhakrishnan ; Jing Li ; N. Balasubramanian
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2008
Conference Location: Sanya, China
Conference Date: 6 January 2008
Page(s): 270 - 273
ISBN (CD): 978-1-4244-1908-1
ISBN (Paper): 978-1-4244-1907-4
DOI: 10.1109/NEMS.2008.4484333
Regular:

We present design and simulation results of a NEMS (nanoelectromechanical system) based mechanical sensor using a silicon suspended-beam comprising two-dimensional (2-D) photonic crystal... View More

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