IEEE - Institute of Electrical and Electronics Engineers, Inc. - Design of a thermally driven resonant miniature electric field sensor with feedback control

3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Author(s): Xianxiang Chen ; Chunrong Peng ; Shanhong Xia
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2008
Conference Location: Sanya, China
Conference Date: 6 January 2008
Page(s): 253 - 256
ISBN (CD): 978-1-4244-1908-1
ISBN (Paper): 978-1-4244-1907-4
DOI: 10.1109/NEMS.2008.4484329
Regular:

A thermally driven resonant miniature electric field sensor (MEFS) with feedback control has been designed. It is mainly comprised of grounded shielding electrodes, bent beam thermal driver,... View More

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