IEEE - Institute of Electrical and Electronics Engineers, Inc. - Modeling and simulation of infrared reflectance spectra of deep trench structures of DRAM

3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Author(s): Chuanwei Zhang ; Shiyuan Liu ; Tielin Shi ; Huayong Gu
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2008
Conference Location: Sanya, China
Conference Date: 6 January 2008
Page(s): 227 - 230
ISBN (CD): 978-1-4244-1908-1
ISBN (Paper): 978-1-4244-1907-4
DOI: 10.1109/NEMS.2008.4484324
Regular:

This paper proposes a nondestructive technique for measuring deep trench structures of DRAM using infrared reflectance spectrometry. By processing layered-film optical model equivalents of various... View More

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