IEEE - Institute of Electrical and Electronics Engineers, Inc. - Investigation of the formation of undercut during the fabrication of silicon microchannels by electrochemical etching

3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Author(s): Jilei Lin ; Xiaoming Chen ; Shaohui Xu ; Peisheng Xin ; Lianwei Wang
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2008
Conference Location: Sanya, China
Conference Date: 6 January 2008
Page(s): 74 - 77
ISBN (CD): 978-1-4244-1908-1
ISBN (Paper): 978-1-4244-1907-4
DOI: 10.1109/NEMS.2008.4484289
Regular:

Silicon microchannel plates have been explored intensively for numerous applications especially for weak light detection and night vision. The electrochemical etching in hydrofluoric acid-based... View More

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