IEEE - Institute of Electrical and Electronics Engineers, Inc. - Design and contact dynamics simulation of an inertia micro-switch based on non-silicon substrate

3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Author(s): Zhuoqing Yang ; Guifu Ding ; Haogang Cai ; Rui Liu ; Xiaolin Zhao
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2008
Conference Location: Sanya, China
Conference Date: 6 January 2008
Page(s): 19 - 22
ISBN (CD): 978-1-4244-1908-1
ISBN (Paper): 978-1-4244-1907-4
DOI: 10.1109/NEMS.2008.4484278
Regular:

A multi-layer structural inertia micro-switch with conjoined snake springs has been designed based on non-silicon substrate. The micro-switch consists mainly of a suspended thick proof mass as a... View More

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