IEEE - Institute of Electrical and Electronics Engineers, Inc. - Research on the Structure of High-speed Large-scale Ultra-precision Positioning System

3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Author(s): Chuan Yang ; G.L. Wang ; B.S. Yang ; H.R. Wang
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2008
Conference Location: Sanya, China
Conference Date: 6 January 2008
Page(s): 9 - 12
ISBN (CD): 978-1-4244-1908-1
ISBN (Paper): 978-1-4244-1907-4
DOI: 10.1109/NEMS.2008.4484276
Regular:

According to the needs in such fields as IC manufacturing and ultra-precision machining, a precision positioning system based on macro-micro dual-drive was developed. The macro positioning system... View More

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