IEEE - Institute of Electrical and Electronics Engineers, Inc. - Electrothermal microgripper with large jaw displacement and integrated force sensors

2008 11th International Conference on Electrical Machines and Systems (ICEMS 2008)

Author(s): T. Chu Duc ; G.K. Lau ; J.F. Creemer ; P.M. Sarro
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2008
Conference Location: Wuhan, China
Conference Date: 13 January 2008
Page(s): 519 - 522
ISBN (CD): 978-1-4244-1793-3
ISBN (Paper): 978-1-4244-1792-6
ISSN (Paper): 1084-6999
DOI: 10.1109/MEMSYS.2008.4443707
Regular:

This paper presents a novel sensing microgripper based on silicon-polymer electrothermal actuators and piezoresistive force sensing cantilever beams which can monitor the displacement of the... View More

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