IEEE - Institute of Electrical and Electronics Engineers, Inc. - High repetition rate pulsed power generator for extreme ultraviolet light source

2007 IEEE Pulsed Power Plasma Science - Conference Record

Author(s): T. Sakugawa ; K. Nagano ; Y. Kondo ; T. Namihira ; S. Katsuki ; H. Akiyama
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2007
Conference Location: Albuquerque, NM, USA
Conference Date: 17 June 2008
Volume: 1
Page(s): 702 - 705
ISBN (CD): 978-1-4244-0914-3
ISBN (Paper): 978-1-4244-0913-6
DOI: 10.1109/PPPS.2007.4651937
Regular:

Recently, all solid-state pulsed power generators, which are operated with high repetition rate, long lifetime and high reliability, have been developed for industrial applications, such as high... View More

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