IEEE - Institute of Electrical and Electronics Engineers, Inc. - Young's Modulus of High Aspect Ratio Si3N4 Nano-thickness Membrane

7th IEEE International Conference on Nanotechnology

Author(s): Ping-Hei Chen ; Cheng-Hao Yang ; Chien-Ying Tsai ; Tien-Li Chang ; Wei-Cheng Hsu ; Ta-Chih Chen
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 August 2007
Conference Location: Hong Kong, Hong Kong
Conference Date: 2 August 2007
Page(s): 1,341 - 1,344
ISBN (CD): 978-1-4244-0608-1
ISBN (Paper): 978-1-4244-0607-4
DOI: 10.1109/NANO.2007.4601367
Regular:

The physical properties of nano-thickness membrane are known to be different from those of bulk material. However, it requires a novel approach to measure the physical properties of nano-thickness... View More

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