IEEE - Institute of Electrical and Electronics Engineers, Inc. - Low Temperature Silicon Oxinitride Technology for Compact CMOS Compatible Planar Optical Devices
COIN-ACOFT 2007 - International Conference on Optical Internet held jointly with the 32nd Australian Conference on Optical Fibre Technology
Author(s): | K. Bayat ; S.K. Chaudhuri ; S. Safavi-Naeini |
Publisher: | IEEE - Institute of Electrical and Electronics Engineers, Inc. |
Publication Date: | 1 June 2007 |
Conference Location: | Melbourne, VIC, Australia |
Conference Date: | 24 June 2007 |
Page(s): | 1 - 3 |
ISBN (CD): | 978-0-9775657-3-3 |
DOI: | 10.1109/COINACOFT.2007.4519157 |
Regular:
We have developed a low temperature CMOS compatible silicon oxinitride based optical integrated circuit technology. The wide range of the refractive indices, 1.45-1.75, has been achieved which is... View More