IEEE - Institute of Electrical and Electronics Engineers, Inc. - Low Temperature Silicon Oxinitride Technology for Compact CMOS Compatible Planar Optical Devices

COIN-ACOFT 2007 - International Conference on Optical Internet held jointly with the 32nd Australian Conference on Optical Fibre Technology

Author(s): K. Bayat ; S.K. Chaudhuri ; S. Safavi-Naeini
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2007
Conference Location: Melbourne, VIC, Australia
Conference Date: 24 June 2007
Page(s): 1 - 3
ISBN (CD): 978-0-9775657-3-3
DOI: 10.1109/COINACOFT.2007.4519157
Regular:

We have developed a low temperature CMOS compatible silicon oxinitride based optical integrated circuit technology. The wide range of the refractive indices, 1.45-1.75, has been achieved which is... View More

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