IEEE - Institute of Electrical and Electronics Engineers, Inc. - Advanced Laser Microprocessing for Substrates Microprocessing of Microsystems and Optoelectronics Devices Applications

2007 International Semiconductor Conference, CAS 2007

Author(s): D. Ulieru ; A. Tantau ; E. Ulieru ; I. Cernica ; A. Matei ; V. Schiopu ; F. Pistritu
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 October 2007
Conference Location: Sinaia, Romania
Conference Date: 15 October 2007
Volume: 1
Page(s): 155 - 158
ISBN (Paper): 978-1-4244-0847-4
ISSN (Paper): 1545-827X
DOI: 10.1109/SMICND.2007.4519670
Regular:

Lasers are an important tool in the fabrication of microsystems like MOEMS and photonic components and in particular their use in scribing for separating LED dies on sapphire substrates. This... View More

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