IEEE - Institute of Electrical and Electronics Engineers, Inc. - Simulation and Design of a Microcantilever for Biosensing Application

2007 International Semiconductor Conference, CAS 2007

Author(s): M. Ion ; C. Pachiu ; C. Moldovan
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 October 2007
Conference Location: Sinaia, Romania
Conference Date: 15 October 2007
Volume: 1
Page(s): 143 - 146
ISBN (Paper): 978-1-4244-0847-4
ISSN (Paper): 1545-827X
DOI: 10.1109/SMICND.2007.4519667
Regular:

Microcantilevers with very small mass and dimensions can detect mass changes at individual molecules level. Therefore, the paper is dedicated to cantilever sensor design optimization. The... View More

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