IEEE - Institute of Electrical and Electronics Engineers, Inc. - Technological Methods for Low Temperature Microfluidic Devices Microfabrication

2007 International Semiconductor Conference, CAS 2007

Author(s): A. Coraci ; C. Podaru ; E. Manea ; E. Iancu ; A. Ciuciumis ; A. Popescu ; O. Corici
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 October 2007
Conference Location: Sinaia, Romania
Conference Date: 15 October 2007
Volume: 1
Page(s): 107 - 110
ISBN (Paper): 978-1-4244-0847-4
ISSN (Electronic): 2377-0678
ISSN (Paper): 1545-827X
DOI: 10.1109/SMICND.2007.4519658
Regular:

The microchannel based microfluidic devices were obtained using techniques assuming thermal treatments up to 1000°C affecting the processes previously realized on the IC chip. This paper aims to... View More

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