IEEE - Institute of Electrical and Electronics Engineers, Inc. - Reliability Accelerated Testing of MEMS Acccelerometers

2007 International Semiconductor Conference, CAS 2007

Author(s): M. Bazu ; L. Galateanu ; V.E. Ilian ; J. Loicq ; S. Habraken ; J.-P. Colette
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 October 2007
Conference Location: Sinaia, Romania
Conference Date: 15 October 2007
Volume: 1
Page(s): 103 - 106
ISBN (Paper): 978-1-4244-0847-4
ISSN (Paper): 1545-827X
DOI: 10.1109/SMICND.2007.4519657
Regular:

An attempt to assess the reliability of a batch of MEMS accelerometers is presented. The testing plan is application oriented and contains combined tests: thermal and mechanical stresses (two... View More

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