IEEE - Institute of Electrical and Electronics Engineers, Inc. - Improvements on an out-of-plane MEMS quadrupole for portable mass spectrometry

20th International Vacuum Nanoelectronics Conference

Author(s): L.F. Velasquez-Garcia ; K. Cheung ; A.I. Akinwande
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 July 2007
Conference Location: Chicago, IL, USA
Conference Date: 8 July 2007
Page(s): 2 - 3
ISBN (CD): 978-1-4244-1134-4
ISBN (Paper): 978-1-4244-1133-7
DOI: 10.1109/IVNC.2007.4480906
Regular:

Quadrupoles are mass filters composed of a set of four cylindrical rods in a symmetrical setup that are biased with a combination of DC and RF potentials. There has been an active interest in... View More

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