IEEE - Institute of Electrical and Electronics Engineers, Inc. - A novel polysilicon based process for three terminal surface micromachined cantilever

2007 International Workshop on Physics of Semiconductor Devices (IWPSD '07)

Author(s): U.B. Katreddi ; U.V. Babu ; E. Bhattacharya
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 December 2007
Conference Location: Mumbai, India
Conference Date: 16 December 2007
Page(s): 733 - 736
ISBN (CD): 978-1-4244-1728-5
ISBN (Paper): 978-1-4244-1727-8
DOI: 10.1109/IWPSD.2007.4472625
Regular:

A three terminal cantilever beam can be used as a switch and also for material and process characterization. This paper deals with process optimization for its fabrication with surface... View More

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