IEEE - Institute of Electrical and Electronics Engineers, Inc. - Electrical measurement of undercut in surface micromachined structures

2007 International Workshop on Physics of Semiconductor Devices (IWPSD '07)

Author(s): S. Bhat ; E. Bhattacharya
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 December 2007
Conference Location: Mumbai, India
Conference Date: 16 December 2007
Page(s): 702 - 705
ISBN (CD): 978-1-4244-1728-5
ISBN (Paper): 978-1-4244-1727-8
DOI: 10.1109/IWPSD.2007.4472617
Regular:

In a surface micromachined cantilever, the gap (g), beam thickness (t) and width get modified during fabrication. Since performance of sensors and actuators strongly depend on the final geometry,... View More

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