IEEE - Institute of Electrical and Electronics Engineers, Inc. - Three-Dimensional Photonic Crystals Fabricated by Double-Angled Plasma Etching

CLEO '07. 2007 Conference on Lasers and Electro-Optics

Author(s): S. Takahashi ; T. Nakamori ; M. Okano ; M. Imada ; S. Noda
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 May 2007
Conference Location: Baltimore, MD, USA
Conference Date: 6 May 2007
Page(s): 1 - 2
ISBN (CD): 978-1-55752-834-6
DOI: 10.1109/CLEO.2007.4453246
Regular:

Three-dimensional photonic crystals with a depth of two lattice constants are successfully fabricated by a two-stage angled plasma etching method. The sample showed ~90% reflectance and ~10 dB... View More

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