IEEE - Institute of Electrical and Electronics Engineers, Inc. - Multi-Axis Electrothermal Scanning Micromirror with Low Driving Voltage

CLEO '07. 2007 Conference on Lasers and Electro-Optics

Author(s): Kemiao Jia ; Huikai Xie
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 May 2007
Conference Location: Baltimore, MD, USA
Conference Date: 6 May 2007
Page(s): 1 - 2
ISBN (CD): 978-1-55752-834-6
DOI: 10.1109/CLEO.2007.4452788
Regular:

This paper presents the design, fabrication and measurement results of a multi-axis electrothermal micromirror. This micromirror employs unique bimorph actuators to achieve one-dimensional piston... View More

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